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Nanofabrication Facility

Nanotech supports nanofabrication research by providing tools and training for academic institutions, industries, and government agencies. The facility features 12,700 square feet of clean room space to do research using state-of-the-art equipment and offers a wide-range of capabilities.

A full list of instrumentation can be found here: Tool List - UCSB Nanofab Wiki

Facilities

  • Class 100 in Lithography bays, Class 1000 elsewhere
  • Calibrated Hotplates checked weekly, ±1°C
  • De-Ionized Water ≥ 18MΩ, Low-particle Nitrogen guns
  • Environmental sensors monitored & alarmed (especially in Lithography Bays) 
  • Re-usable anti-static cleanroom gowns with laundry service
  • Many supplies provided, such as notebooks, toolboxes, chemicals, deposition source materials and other ancilliaries

Equipment

  • Rapid response to equipment & facilities failures
  • ​Minimized equipment downtime with high ratio of industry-experienced staff to equipment
  • ​Regular periodic maintenance
  • ​Responsive to user process needs
  • ​Equipment reservations on SignupMonkey

Process

  • Stepper Lithography Systems calibrated weekly
  • ​Regular Process Monitoring for PECVD systems
  • ​Qualified processes on many etch systems
  • ​Historical process monitoring to validate system performance
  • ​Starting Recipes and Historical Data on the NanoFab Wiki

 

Access Procedure: 

Services | UCSB Nanofab

Instruments

  1. Dry Etch

    Reactive Ion Etching (RIE); Plasma Etching and Cleaning; Etch Monitoring; ICP-RIE; Ion Milling and Reactive Ion Beam Etching; Other Dry Etching

  2. Inspection, Test and Characterization

    Optical Microscopy; Electron Microscopy; Topographical Metrology; Thickness + Optical Constants; Electrical Analysis; Other Properties

  3. Lithography

    Photoresists and Lithography Chemicals; Contact Aligners (Optical Exposure); Direct-Write Lithography; Other Patterning Systems; Steppers (Optical Exposure); Thermal Processing for Photolithography; Lithography Support

  4. Packaging

    Die Singulation / Down-sizing; Other Packaging; Wafer/Die Bonding

  5. Thermal Processing

    Check the NanoFab Wiki for the most updated instrumentation.

  6. Vacuum Deposition

    Thermal Evaporation; Sputter Deposition; Chemical Vapor Deposition (CVD)

  7. Wet Processing

    See the Chemical List page for stocked chemicals such as Developers, Etchants, Solvents etc.