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Microscopy and Microanalysis Facility

The Mircoscopy and Microanalysis facility is a partner with the MRL, and provides three full time staff members to administer access and training for a wide range of instrumentation, including electron microscopes, scanning probe microscopes, atom probe tomography, SIMS, XPS, and Focused Ion Beams for sample prep and analysis.

Access Procedure: 

Please visit the Microscopy and Microanalysis Facility webpage (http://www.mrl.ucsb.edu/microscopy-and-microanalysis-facility) for access information.

Note that this facility recharges through the Materials academic department, not the MRL.

Instruments

  1. Asylum MFP-3D Bio System w/ Olympus IX71 Inverted Microscope »
    Campus Gov't/Academic Industry

    Operation Modes: AC, Contact, LFM, Force, Nanolithography, EFM and Conductive AFM, and Low Force Indenter.  Liquid AFM with closed fluid cell; Fluorescence filters.

  2. Asylum MFP-3D Standard System w/Low Force Indenter »
    Campus Gov't/Academic Industry

    Operation Modes: AC, Contact, LFM, Force, Nanolithography, EFM and Conductive AFM, and Low Force Indenter.

    Features: 90 micron travel in (x,y) and 15 micron in z; X-Y closed loop (non-linearity <0.5%) and Z-closed loop (<0.2%); ARgyle-3D imaging in real time; AFM control program integrated with IGOR pro.

  3. Cameca IMS 7f Auto Dynamic Secondary Ion Mass Spectrometry (SIMS) »
    Campus Gov't/Academic Industry

    Dynamic SIMS creates profiles of solid materials, determining elemental composition as a function of depth. The key attributes of SIMS are its unparalleled sensitivity (detection down to ppb levels in some cases) and its high depth resolution (as low as 30 Angstroms).

  4. FEI DB235 Dual-Beam Focus Ion Beam System (FIB) w/ EDS »
    Campus Gov't/Academic Industry

    DB235 is small stage system combining a Hexalens electron column and a Magnum ion column for failure analysis and high-end sample preparation. A Schottkey emitter is used for scanning electron microscopy (SEM) under 200 – 300 kV, while Gallium liquid metal is for focus ion beam (FIB) operated at 5 to 30 kV in a current range of 1pA to 20 nA. 3D imaging can be carried out by using these two beams arranged in 52°-tilt angle. The resolution is 3 nm for SEM and 7 nm for FIB.

  5. FEI Inspect S Electron Scanning Microscope w/ Cathodoluminescence System »
    Campus Gov't/Academic Industry

    High resolution scanning electron microscope completely controlled under WindowNT. Equipped with a high stability Schottky field emission gun and a large specimen chamber (379x280 mm door size).  Oxford CL2 cathodoluminescence system will be attached.  Back scattering detector for Z-imaging.

    Voltage: 200 - 30 kV; Resolution: 3.0 nm @30kV; 10 nm @3kV.   

  6. FEI Tecnai G2 Sphera Microscope for Life Science Studies »
    Campus Gov't/Academic Industry

    This microscope is designed for 200kV and lower operation voltages, suitable for studies of biological, organic and other beam sensitive materials. For that purpose, this microscope is equipped with a CCD camera (Gatan Ultrascan 1000 2Kx2K) and a cryo-station for specimen preparation and transfer within liquid nitrogen. With a LaB6 emitter, the resolution is 0.27 nm at 200kV. Features: (1) Tomography with high tilt and large field of view; (2) CompuStage with Smart-Tilt software; (3) Low-dose exposure.

  7. FEI Tecnai G2 Sphera Microscope w/ EDS System for Materials Science Studies »
    Campus Gov't/Academic Industry

    This microscope is equipped with a LaB6 emitter and S-twin lens for higher resolution at 200kV.  Also an Oxford electron dispersive X-ray spectroscopy (EDS) system is attached for chemical analysis, and a Gatan UltraScan 1000P CCD camera for image recording (2kx2k).

    Point resolution 0.24 nm; Line res. 0.14 nm; Cs = 1.2 mm; Cc = 1.2 mm.

    Specimen holders: (1) Single tilt holder ±40°; (2) Double tilt holder (x ±40°, y ±40°).

  8. FEI Titan 300 kV FEG TEM/STEM System w/EDS & EELS »
    Campus Gov't/Academic Industry

    With a field emission gun (FEG), this microscope is designed for both high resolution TEM/STEM and analytical microscopy.

  9. FEI Titan 300 kV FEG TEM/STEM System w/EDS & EELS »
    Campus Gov't/Academic Industry

    With a field emission gun (FEG), this microscope is designed for both high resolution TEM/STEM and analytical microscopy. The attachments of this microscope are: (1) A scanning unit with a high-angle annular dark-field (HAADF) detector for scanning TEM (Z-contrast imaging); (2) Gatan Enfina 1000 system for electron energy-loss spectroscopy (EELS); (3) Electron dispersive X-ray analysis system (EDXA) for chemical information; (4) Gatan wide-angle CCD (2kx2k) for image recording. 

  10. FEI Titan FEG High Resolution TEM/STEM and Analytical Microscope »
    Campus Gov't/Academic Industry

    This microscope is designed for 200kV and lower operation voltages, suitable for studies of biological, organic and other beam sensitive materials.

  11. FEI XL30 Sirion FEG Digital Electron Scanning Microscope »
    Campus Gov't/Academic Industry

    High resolution scanning electron microscope completely controlled under WindowNT. Equipped with a high stability Schottky field emission gun and a large specimen chamber (379x280 mm door size). Back scattering detector for Z-imaging.

    Voltage: 500-30keV; Resolution: 1.2 nm @30keV.

  12. FEI XL40 Sirion FEG Digital Scanning Microscope w/EDS »
    Campus Gov't/Academic Industry

    High resolution scanning electron microscope completely controlled under WindowNT. Equipped with a high stability Schottky field emission gun and a large specimen chamber (379x280 mm door size).  Oxford Inca x-ray system is attached. Back scattering detector for Z-imaging.

    Voltage: 500-30keV; Resolution: 1.2 nm @30keV.

  13. FEI XL40 Sirion FEG with EDS »
    Campus Gov't/Academic Industry

    High resolution SEM completely controlled under WindowNT. Equipped with a high stability Schottky field emission gun and a large specimen chamber (379x280 mm door size). Oxford Inca x-ray system is attached. Back scattering detector for Z-imaging. Voltage: 500-30keV; Resolution: 1.2 nm @30keV.

  14. Imago LEAP 3000X HR Atom Probe Microscope »
    Campus Gov't/Academic Industry

    Atom probe provides atomic -resolution, three-dimensional imaging, compositional imaging, and analyses. The Imago atom probe is used to analyze the structure and composition of materials for light emission and electronic devices, materials systems for advanced propulsion, energy generation, including gas turbines and nuclear reactors, and hypersonic flight.

    The atom probe instrument can be used to solve key problems in interfacial chemistry and abruptness, alloy composition and homogeneity, and dopant and impurity concentrations in a wide range of materials.

  15. JEOL 6320FXV Field Emission FESEM »
    Campus Gov't/Academic Industry

    High resolution field emission cold cathode scanning electron microscope with semi-in-lens detector configuration achieving resolution down to 2 nm. It is equipped with BE (backscattered) detector and thin window energy dispersive X-ray spectrometer (EDS) from Princeton Gamma-Tech for compositional analysis, imaging and mapping. Fully digital image acquisition.

  16. Kratos Axis Ultra X-ray Photoelectron Spectroscopy (XPS) system »
    Campus Gov't/Academic Industry

    The Kratos Ultra combines XPS (X-Ray Photoelectron Spectrometry) with an imaging capability that allows us to produce 2-dimensional chemical-state maps with spatial resolution as fine as 10 microns. The system is also equipped with a UV discharge lamp allowing He I/He II UPS (ultraviolet) spectroscopy for valence-band studies. The system provides excellent charge compensation for non-conductive specimens.

  17. Veeco Dimension 3000/3100 Scanning Probe Microscope »
    Campus Gov't/Academic Industry

    These SPMs have the similar functions in surface measurements with the Milti-Mode microscope as stated above. The major difference is that this microscope is designed for imaging a 6" wafer. A large specimen stage is provided and the microscope is located in an anti-vibration hood. Inside the microscope, there is an optical system by the scanner to guide the scan with an image of the sample surface shown on the screen. With this optical image, users can search a specific feature as small as 0.1µm to scan.

  18. Veeco Multi-Mode NanoScope I & II »
    Campus Gov't/Academic Industry

    This microscope can be performed at both tapping and contact mode with highest resolution manufactured. With either the D-type (10x10x25µm) or the J-type scanner (125x125x5µm), images on both atomic and macroscopic scales can easily be obtained. The microscope performs the full range of SPM techniques to measure surface characteristics such as surface topography, elasticity, friction, adhesion, magnetic fields, and electrical fields. Surfaces of a wide range of materials, including conducting and non-conducting samples, can be examined with this microscope.