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California NanoSystems Institute
NanoStructures Cleanroom Facility
Facility Primary Contact:
Rachel Schoeppner
Available to:
Open to qualified campus users:
Yes
Established recharge procedure:
Yes
Open to academic and national lab users:
Case-by-case
Open to industry users:
Case-by-case
Bruker DektakXT Stylus Profilometer
Instrument types
Uncategorized
Make / Model :
Bruker DektakXT Stylus Profilometer
Instrument URL:
More details about this Instrument
Better than 5 Å step height repeatability
Up to 1mm measurement range
50 µm to 55 mm scan length
Low inertia sensor with 1 to 15 mg of force
2 and 12.5 µm radius stylus tips
Surface topography, waviness, and roughness measurement capability
2D stress measurement capability
Substrates up to 6"
Technical Primary Contact:
Rachel Schoeppner
Access Procedure:
Please contact Rachel Schoeppner for access procedure.
