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NanoStructures Cleanroom Facility

Tool sets and processes complement research in the chemical and biological nanostructures labs enabling unique capabilities in the pursuit of controlling and manipulating materials at the nanoscale.
Access Procedure: 

Please contact Jen Smith for access procedure.

Instruments

  1. AIXTRON Black Magic PECVD System »
    Campus Gov't/Academic Industry

    Highly flexible thermal or plasma enhanced CVD system capable of carbon nanotube, nanofiber, and graphene deposition.

  2. Bruker DektakXT Stylus Profilometer »
    Campus Gov't/Academic Industry

    Advanced thin and thick film step height measurement tool.

  3. Organic PhotoVoltaic Device Manufacturing System »
    Campus Gov't/Academic Industry

    Complete processing in inert/dry atmosphere

  4. SEKI Diamond CVD »
    Campus Gov't/Academic Industry

    Highest quality Diamond films with or without Nitrogen Doping

  5. Sentro Tech High Temp Box Furnace »
    Campus Gov't/Academic Industry
    • 1700C capability
    • Inert Gas purge
    • MoSi2 Heating Elements
  6. Suss MicroTec MA6 Aligner »
    Campus Gov't/Academic Industry
  7. Wet Processing »
    Campus Gov't/Academic Industry

    5 benches