A high-resolution dual-beam focused ion beam and scanning electron microscope. The instrument is equipped with an Elstar field emission SEM for nanometer resolution imaging and a Tomahawk FIB column operating from 30 kV down to 500 V. Ion currents range from 7 pA, providing a minimal beam size of 7 nm, to 22 nA which can be used for substantial milling tasks. The very stable piezo-driven stage can operate on an area of 150 x 150 mm. Attached is currently a gas source for platinum deposition as well as an Omniprobe manipulator that is typically used for the transfer of TEM and APT samples.