High-resolution scanning electron microscope; equipped with a high stability Schottky field emission gun and a large specimen chamber (379 x 280 mm door size); Voltage: 500-30 keV; Resolution: 1.2 nm @ 30 keV. Detectors include an ETD detector for basic secondary electron imaging and a through-lens detector for high-resolution SE imaging. Backscattering detector for Z-imaging.