High-resolution scanning electron microscope; equipped with a high-stability Schottky field emission gun and a large specimen chamber and compound electrostatic/electromagnetic immersion lenses. Detectors include standard SE; dedicated backscattering detector for Z-imaging; T1, T2, and T3 through-lens detectors for high-resolution imaging; STEM detector; direct electron detector with adjustable degrees of freedom for electron backscattered diffraction or transmission geometries.