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Electrical and Computer Engineering
Nanofabrication Facility
Facility Primary Contact:
Brian Thibeault
Available to:
Open to qualified campus users:
By Recharge
Established recharge procedure:
Yes
Open to academic and national lab users:
By Recharge
Open to industry users:
By Recharge
Thermal Processing
Check the NanoFab Wiki for the most updated instrumentation.
Rapid Thermal Annealer/Processor "RTA" (AET RX6)
Rapid Thermal Processor (SSI Solaris 150)
Tube Furnace (Tystar 8300)
Tube Furnace Wafer Bonding (Thermco)
Tube Furnace AlGaAs Oxidation (Lindberg)
Wafer Bonder (SUSS SB6-8E)
Wafer Bonder/Wax Mounting (Logitech WBS2)
Ovens - Overview of all Lab Ovens
Ovens 1, 2 & 3 (Labline)
Oven 4 (Thermo-Fisher HeraTherm)
Oven 5 (Labline)
High Temp Oven (Blue M)
Access Procedure:
Services | UCSB Nanofab