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California NanoSystems Institute
NanoStructures Cleanroom Facility
Facility Primary Contact:
Rachel Schoeppner
Available to:
Open to qualified campus users:
Yes
Established recharge procedure:
Yes
Open to academic and national lab users:
Case-by-case
Open to industry users:
Case-by-case
Suss MicroTec MA6 Aligner
Instrument types
Lithography
Make / Model :
Suss MicroTec MA6 Aligner
Instrument URL:
More details about this Instrument
Technical Primary Contact:
Jen Smith
Access Procedure:
Please contact Rachel Schoeppner for access procedure.
