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Ellipsometer (Rudolph)

Instrument types
Make / Model : 
Rudolph Research AutoELII

This ellipsometer is a single wavelength (632.8 nm) system for characterization of thin films. The system can determine complex index of refraction constants of substrates (k and n) and can determine the thickness and real part of the index of refraction for thin films on substrates with known optical parameters. The thickness can be measured down to 10s of Angstroms and has an accuracy of about 10A on thickness and 0.01 on index of refraction for SiO2 on Silicon. Thicker films can also be measured.

Technical Primary Contact:
Mike Silva

Access Procedure: 

Contact Tom Reynolds to find out more about access and training for the Nanofabrication Facility.