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HF/TMAH Processing Bench

Make / Model : 
Pure Aire Corporation

Detailed Specifications

  • 2 Sinks, DI water
  • 2 Nitrogen guns for sample drying
  • Digital hot-plate stirrers
  • Ultrasonic Baths
  • NO SOLVENTS
  • HF Processing limited to these two benches
  • POLOS Spray-Spin-Rinse systems
  • Hepa Filtered Laminar Flow Hoods
Access Procedure: 

Contact Tom Reynolds to find out more about access and training for the Nanofabrication Facility.