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California NanoSystems Institute
NanoStructures Cleanroom Facility
Facility Primary Contact:
Rachel Schoeppner
Available to:
Open to qualified campus users:
Yes
Established recharge procedure:
Yes
Open to academic and national lab users:
Case-by-case
Open to industry users:
Case-by-case
AIXTRON Black Magic PECVD System
Instrument types
Deposition
Make / Model :
AIXTRON Black Magic PECVD System
Instrument URL:
More details about this Instrument
Low temperature, multiwall, singlewall and supergrowth nanotubes via thermal growth or PECVD
Graphene growth
High heater ramp rates and closed loop substrate temperature control via an infrared temperature sensor
High temperature annealing up to 1000°C in Hydrogen / Argon / Nitrogen, maximum ramp rate of up to 300°C/min
Ultra-high purity gas delivery system to ensure high quality films with repeatable results
Substrates up to 6"
Restrictions on substrate materials
Technical Primary Contact:
Rachel Schoeppner
Access Procedure:
Please contact Rachel Schoeppner for access procedure.
